POTSDAM — Clarkson University has received more than $537,000 in royalty payments for a chemical-mechanical planarization slurry formulation developed in the college's Center for Advanced Materials Processing.
The royalties, which have been paid by Ferro Corporation over the past seven years, cover licenses for a water-based chemical formulation that gives the insulation in silicon microchips a uniform smoothness.
The formulation was developed by Ramanathan Srinivasan, an associate professor at the Indian Institute of Technology in Chennai, India, and the late William G. America, 2006-2007 deputy director for CAMP, in the laboratory of Clarkson professor and current CAMP director S.V. Babu.